德国wika高纯压力传感器WUC-10防爆区域Ex nA ic

德国wika高纯压力传感器WUC-10防爆区域Ex nA ic wika授权代理
WUC-10压力传感器的应用
半导体、平板显示器和太阳能光伏产品
高纯介质和特殊气体系统（气棒、气板、大宗气体供应和油罐区安装）
WUC-10压力传感器的功能特性
结构紧凑
ATEX 2区防爆***
防护等级：IP67 (NEMA 4)，带旁路零点电位器
***的EMC稳定性
自动温度补偿

WUC-10压力传感器的描述
紧凑结构
WUC-1X型传感器设计精巧，为工厂和安装环境提供了更大的自由空间。
WUC-15和16系列传感器以优良的自排水特性闻名天下。通过这一特殊的传感器连接设计，用户可以避免工艺连接件或焊缝上的负载对传感器信号产生影响。
多功能
该传感器的防护等级高达IP 67，可用于油罐区和户外特种气体装置等恶劣环境。
该系列产品还可用于防爆2区。即使介质（如PH3（磷化氢））自燃温度很低，T6的温度等级也可确保仪表在测量时不会发生任何问题。
可靠性
循环压力冲洗、高气体节流值（焦耳-汤普森效应）和外部操作都可能导致强烈的温度波动。主动温度补偿功能可以检测这些变化，并且***大限度地降低这些变化对仪表的影响，确保测量稳定。
通过密封的“侧面通道”进行零点调整，确保仪表长期保持高达IP67的防护等级，简化操作过程，避免意外调整。
所有接液部件的材料均为316L VIM VAR，特殊薄膜传感器则由2.4711/ UNS R30003制成。进行***终组装前，我们对所有接液部件都采用***的工艺进行电抛光和清洗。
每个传感器均经过检验，足以满足SEMI™标准在密封性、过压稳定性、精度和颗粒方面的要求。

Specifications
Model WUC-10, WUC-15
Model WUC-16
Measuring range (psi) 30 60 100 160 250 350 500 1,000 1,500 2,000 3,000 5,000
Measuring range (bar) 2 4 7 11 17 25 36 70 100 145 225 360
Overload safety (psi) 120 120 210 320 500 750 1,100 2,100 3,000 4,200 6,600 10,000
Burst pressure (psi) 1,800 1,800 2,200 2,600 4,800 6,200 7,400 8,000 10,500 10,500 10,500 10,500
Further measuring ranges on request
Measuring principle Thin-film sensor
Materials
■ Wetted parts Process connection: 316L stainless steel, according to SEMI F20 (option: 316L VIM/VAR)
Thin-film sensor: 2.4711 / UNS R30003
■ Case 304 SS
Helium leak test < 1 x 10-9 mbar l/sec (atm STD cc/sec) per SEMI F1
Surface treatment Electropolished, typical Ra ≤ 0.13 μm (RA 5); max. Ra ≤ 0.18 μm (RA 7) per SEMI F19
Dead volume WUC-10 < 1.5 cm³, WUC-15 < 1 cm³, WUC-16 < 1 cm³
Permissible media Speciality gases, vapours, liquids
Power supply U+ DC 10 ... 30 V with output signal DC 0 ... 5 V / 4 ... 20 mA
DC 14 ... 30 V with output signal DC 0 ... 10 V
Output signal and permissible
max. load RA in Ω
4 ... 20 mA, 2-wire, RA ≤ (U+ – 10 V) / 0.02 A
DC 0 ... 5 V, 3-wire, RA > 5 kΩ
DC 0 ... 10 V, 3-wire, RA > 10 kΩ
Power Pmax 1 W
Adjustability of zero point -5 ... +3.5 % of span (via potentiometer) current output signal
-2 ... +5 % of span (via potentiometer) voltage output signal
Response time (10 ... 90 %) ≤ 300 ms
Insulation voltage DC 500 V
Accuracy ≤ 0.2 % of span (≤ 0.4 % of span for measuring ranges ≤ 2 bar) RSS (root sum squares)
≤ 0.5 % of span 1) (≤ 1.0 % of span 1) for measuring ranges ≤ 2 bar) per IEC 61298-2
Non-linearity ≤ 0.1 % of span (≤ 0.15 % of span for measuring ranges ≤ 2 bar) (BFSL) per IEC 61298-2
Hysteresis ≤ 0.14 % of span
Non-repeatability ≤ 0.12 % of span
Stability per year ≤ 0.25 % of span (typ.) at reference conditions (≤ 0.4 % of span with measuring ranges ≤ 2 bar)
Permissible temperature
ranges
non-Ex T4 T5 T6
■ Medium -20 ... +100 °C
-4 ... +212 °F
-20 ... +85 °C
-4 ... +185 °F
-20 ... +60 °C
-4 ... +140 °F
-20 ... +40 °C
-4 ... +104 °F
■ Ambient -20 ... +85 °C
-4 ... +185 °F
-20 ... +85 °C
-4 ... +185 °F
-20 ... +60 °C
-4 ... +140 °F
-20 ... +40 °C
-4 ... +104 °F
■ Storage -40 ... +100 °C
-40 ... +212 °F
-40 ... +100 °C
-40 ... +212 °F
-40 ... +100 °C
-40 ... +212 °F
-40 ... +100 °C
-40 ... +212 °F
Rated temperature range -20 ... +80 °C, -4 ... +176 °F (actively compensated)
Temperature coefficients within
the rated temperature range
(actively compensated)
■ Mean TC of zero ≤ 0.1 % of span/10 K
■ Mean TC of span ≤ 0.15 % of span/10 K
Production environment Clean room class 5 per *** 14644
Packaging Double packaging per SEMI E49.6
Shock resistance 500 g (1.5 ms) per IEC 60068-2-27
Vibration resistance 0.35 mm (10 ... 58 Hz) / 5 g (58.1 ... 2,000 Hz) per EN 60068-2-6
Short-circuit resistance S+ vs. U- (short time)
Reverse polarity protection U+ vs. UWeight approx. 0.1 kg