德国wikaWU-20高纯度压力传感器

德国威卡压力变送器WU-20,  德国威卡压力变送器WU-25,  德国威卡压力变送器WU-26
主要应用：高纯度应用的传感器，气体面板（OEM工具），半导体、平板显示器和太阳能光伏产品，特种气体和大宗气体分配。
WU-20压力传感器的功能特性
紧凑型设计
ATEX Zone 2 防爆***
自动温度补偿
***的长期稳定性
符合RoHS指令
WU-20压力传感器的参数
量程：0 ... 0.1 MPa 至 0 ... 36 MPa

精度：0,15 % RSS

输出信号
4 ... 20 mA，2- 线制
0 ... 10 V，3 - 线制
0 ... 5 V，3 - 线制

过程连接
1/4" VCR
1/2" VCR
型焊接接头
焊接接头

电气连接
圆形接头 M12x1， 4-pin
电缆出线盒，IP 67
卡口接头，4-pin
Sub-D HD接头，15-pin

Specifications
Model WU-20, WU-25
Model WU-26
Measuring range (psi) 30 60 100 160 250 350 500 1,000 1,500 2,000 3,000 5,000
Measuring range (bar) 2 4 7 11 17 25 36 70 100 145 225 360
Overload safety (psi) 120 120 210 320 500 750 1,100 2,100 3,000 4,200 6,600 10,000
Burst pressure (psi) 1,800 1,800 2,200 2,600 4,800 6,200 7,400 8,000 10,500 10,500 10,500 10,500
Further measuring ranges on request
Measuring principle Thin-film sensor
Materials
■ Wetted parts Process connection: 316L stainless steel, according to SEMI F20 (option: 316L VIM/VAR)
Thin-film sensor: 2.4711 / UNS R30003
■ Case 304 SS
Helium leak test < 1 x 10-9 mbar l/sec (atm STD cc/sec) per SEMI F1
Surface treatment Electropolished, typical Ra ≤ 0.13 µm (RA 5); max. Ra ≤ 0.18 µm (RA 7) per SEMI F19
Dead volume WU-20 < 1.5 cm³, WU-25 < 1 cm³, WU-26 < 1 cm³
Permissible media Speciality gases, vapours, liquids
Power supply U+ DC 10 ... 30 V with output signal DC 0 ... 5 V / 4 ... 20 mA
DC 14 ... 30 V with output signal DC 0 ... 10 V
Output signal and permissible
max. load RA in Ω
4 ... 20 mA, 2-wire, RA ≤ (U+ – 10 V) / 0.02 A
DC 0 ... 5 V, 3-wire, RA > 5 kΩ
DC 0 ... 10 V, 3-wire, RA > 10 kΩ
Power Pmax 1 W
Adjustability of zero point -3.5 ... +3.5 % of span (via potentiometer), current output
-2 ... +3.5 % of span (via potentiometer), voltage output
Response time (10 ... 90 %) ≤ 300 ms
Insulation voltage DC 500 V
Accuracy ≤ 0.15 % of span (≤ 0.4 % of span with measuring ranges ≤ 2 bar) RSS (root sum squares)
≤ 0.3 % of span 1) (≤ 0.6 % of span 1) with measuring ranges ≤ 2 bar) per IEC 61298-2
Non-linearity ≤ 0.1 % of span (≤ 0.15 % of span for measuring ranges ≤ 2 bar) (BFSL) per IEC 61298-2
Hysteresis ≤ 0.14 % of span
Non-repeatability ≤ 0.12 % of span
Stability per year ≤ 0.25 % of span (typ.), at reference conditions (≤ 0.4 % of span with measuring ranges ≤ 2 bar)
Permissible temperature ranges non-Ex T4 T5 T6
■ Medium -20 ... +100 °C
-4 ... +212 °F
-20 ... +85 °C
-4 ... +185 °F
-20 ... +60 °C
-4 ... +140 °F
-20 ... +40°C
-4 ... +104 °F
■ Ambient -20 ... +85 °C
-4 ... +185 °F
-20 ... +85 °C
-4 ... +185 °F
-20 ... +60 °C
-4 ... +140 °F
-20 ... +40 °C
-4 ... +104 °F
■ Storage -40 ... +100 °C
-40 ... +212 °F
-40 ... +100 °C
-40 ... +212 °F
-40 ... +100 °C
-40 ... +212 °F
-40 ... +100 °C
-40 ... +212 °F
Rated temperature range -20 ... +80 °C, -4 ... +176 °F (actively compensated)
Temperature coefficients within
the rated temperature range
(actively compensated)
■ Mean TC of zero ≤ 0.1 % of span/10 K
■ Mean TC of span ≤ 0.15 % of span/10 K
Assembly and packaging area Clean room class 5 per *** 14644
Packaging Double packaging per SEMI E49.6
Shock resistance 500 g (1.5 ms) per IEC 60068-2-27
Vibration resistance 0.35 mm (10 ... 58 Hz) / 5 g (58.1 ... 2,000 Hz) per IEC 60068-2-6
Short circuit S+ vs. U- (short time)
Reverse polarity U+ vs. UWeight Approx. 0.1 kg
1) Including non-linearity, hysteresis, zero offset and end value deviation (corresponds to measured error per IEC 61298-2)